Factory directly Vacuum Coating Production Line - WVCP6000 Water Vapor Cryopump Cryogenic Refrigeration Systems – Xieyi

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Factory directly Vacuum Coating Production Line - WVCP6000 Water Vapor Cryopump Cryogenic Refrigeration Systems – Xieyi Detail:

Product Description

Guangzhou Xieyi Automation Technology Co., Ltd., which is established in 2011, is the unique high-tech enterprise in South China that engages in the research development, production, technical consultation and service for ultra-low temperature water vapor capture pumps and other ultra-low temperature equipment.

XIEYI WVCP Cryochillers are closed loop cryogenic refrigeration systems that provide 550 watts ~ 6,000 watts of cooling. These cryochillers can be used to capture water vapor and other condensable substances by freezing them onto a cold surface such as a Meissner coil (cryocoil). WVCP cryochillers are also used to cool objects such as electrostatic chucks used in semiconductor wafer processing.

Technical Parameter

Model	WVCP6000-S-H	WVCP6000-D-H
Maximum cooling capacity(W)	6000	6000
The theory maximum pumping speed of tubular cold trap(L/S)	588000	588000
The theory maximum speed of plate cold trap(L/S)	882000	882000
Final vacuum(mbar)	2*10-8	2*10-8
Defrost time of maximum cold trap area(min)	<5	<5
Adjustable range of defrost temperature(℃)	-20~30	-20~30
Pressure control mode	Digital sensor+Mechanical switch	Digital sensor+Mechanical switch
Quick restore balance pressure function(QRBP)	Yes	Yes
Oil blocking proof function(OBP)	Yes	Yes
4G Remote control	Yes	Yes
Cold media properties	Pro-enviroment	Pro-enviroment
Maximum surface area of tubular cold trap(㎡)	4	4
Maximum surface area of plate cold trap(㎡)	6	6
Specification of single cold trap(㎡)	φ16mm*80m	/
Specification of double cold trap(㎡)	/	2φ16mm40m
Gas interface	12.7 copper welded junction(Standard)	12.7 copper welded junction(Standard)
Gas interface	ParkerCPI/VCR(Optional)	ParkerCPI/VCR(Optional)
Cooling water flow(L/Min at 24℃)	48	48
Cooling water alarm temperature(℃)	38	38
Cooling tower	Yes	Yes
Cooling water connector(L/S)	G1”	G1”
Maximum load power(kW)	25.3	25.3
Compressor nominal power(HP)	20	20
Power supply(50HZ)	380-400V AC 3P(H)	380-400V AC 3P(H)
Power supply(50HZ)	200-230V AC 3P(L)	200-230V AC 3P(L)
Dimension(MM)	935(L)873(D)1809(H)	1235(L)873(D)1809(H)
Weight(KG)	655	655

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