WVCP3000 Water Vapor Cryopump Cryogenic Refrigeration Systems

Short Description:

Fast Defrost
Cold trap cooled to -135℃
Decrease Pump down Times by 25% to 50%
Lower power consumption
Minimal environmental impact, free of CFC and HCFCs

Product Detail

Product Tags

Product Description

Guangzhou Xieyi Automation Technology Co., Ltd., which is established in 2011, is the unique high-tech enterprise in South China that engages in the research development, production, technical consultation and service for ultra-low temperature water vapor capture pumps and other ultra-low temperature equipment.

XIEYI WVCP Cryochillers are closed loop cryogenic refrigeration systems that provide 550 watts ~ 6,000 watts of cooling. These cryochillers can be used to capture water vapor and other condensable substances by freezing them onto a cold surface such as a Meissner coil (cryocoil). WVCP cryochillers are also used to cool objects such as electrostatic chucks used in semiconductor wafer processing.

Technical Parameter

Model WVCP3000-S-H WVCP3000-D-H
Maximum cooling capacity(W) 3000 3000
The theory maximum pumping speed of tubular cold trap(L/S) 249900 249900
The theory maximum speed of plate cold trap(L/S) 352800 352800
Final vacuum(mbar) 2*10-8 2*10-8
Defrost time of maximum cold trap area(min) <3 <3
Adjustable range of defrost temperature(℃) -20~30 -20~30
Pressure control mode Digital sensor+Mechanical switch Digital sensor+Mechanical switch
Quick restore balance pressure function(QRBP) Yes Yes
Oil blocking proof function(OBP) Yes Yes
4G Remote control Yes Yes
Cold media properties Pro-enviroment Pro-enviroment
Maximum surface area of tubular cold trap(㎡) 1.7 1.7
Maximum surface area of plate cold trap(㎡) 2.4 2.4
Specification of single cold trap(㎡) φ16mm*34m /
Specification of double cold trap(㎡) / 2*φ16mm*17m
Gas interface 12.7 copper welded junction(Standard) 12.7 copper welded junction(Standard)
ParkerCPI/VCR(Optional) ParkerCPI/VCR(Optional)
Cooling water flow(L/Min at 24℃) 28 28
Cooling water alarm temperature(℃) 38 38
Cooling tower Yes Yes
Cooling water connector(L/S) G3/4 G3/4
Maximum load power(kW) 16.5 16.5
Compressor nominal power(HP) 10 10
Power supply(50HZ) 380-400V AC 3P(H) 380-400V AC 3P(H)
200-230V AC 3P(L) 200-230V AC 3P(L)
Dimension(MM) 935(L)*873(D)*1809(H) 935(L)*873(D)*1809(H)
Weight(KG) 480 480


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